Component & Product Testing

Test of Materials used for UPW Distribution Systems

Polymer materials and components used in UPW distribution systems are potential sources of contamination that can negatively affect the water quality. For that purpose ultrahigh purity (UHP) polymer materials that are used within the production process have to fulfill precise SEMI standard specifications. Therefore, the pre-qualification of these materials is indispensable before they are used within UPW systems.

The following material testing procedures are provided by our laboratory:

  • Static leaching test of tubing, piping, membranes, valves, O-rings according to SEMI F40 in cleanrooms class 5
  • Test conditions 85 ± 5 °C, 7 days (other test conditions can be applied)
  • Analysis of ionic, metallic and organic contamination
  • Determination of particle contamination in a rinse test according to SEMI F104
  • Evaluation of compliance with SEMI F57 contamination specifications
  • Dynamic leaching tests, i.e. continuous flow for classification of UPW through a part or assembly, according to SEMI standards and customer specifications

Product & Process Control for Optical and Laser Devices

Besides the importance within semiconductor industry, clean environments are also essential in the manufacturing of optoelectronic products (LEDs) and laser systems as well as in applications like laser metrology. Outgassing of organic compounds, especially condensable compounds were identified as the main source for deterioration of optics. Organic contamination can lead to hazing on surface of optics, degradation of the coating, reducing the signal transmission or the laser signal itself and can enhance the probability of laser damage.

Sources of organic outgassing can be seals, circuit boards, cable insulation, cleaning agents, coatings, resins and others. Critical compounds are siloxanes, aromatic amines and high boiling aromatic hydrocarbons like phthalates.

The product and process control includes:

  • Component and material testing for production control
  • Screening analysis of organic compounds by thermal desorption
    – Analysis of total VOC
    – Evaluation of low, medium and high boiling organic compounds
  • Issuing of M+W Products certificates

Material Outgassing Studies

The concentration of airborne molecular contaminants is a relevant cleanliness factor and has a significant impact on production processes and product quality. Especially the major emitters VOC and ammonia are of substantial interest.

Our AMC measurement and evaluation procedure encompasses:

  • Outgassing test for organic compounds (VOC+SVOC) according to M+W guidelines and VDI 2083-17 standard
  • Evaluation corresponding to M+W acceptance criteria for cleanrooms and mini environments
  • Determination of material-specific standardized ISO – AMCm class as well as ISO – AMCCR class for actual cleanrooms
  • Analysis by thermal desorption (TD)-GC/MS
  • Issuing a M+W certification for tested equipment, materials, components and products
  • Registration of tested and certified material in the M+W material data base
  • Issuing of M+W Products certificates