Analysis Methods

Chemical Analysis for Organic Contamination

Our laboratory is equipped with state-of-the-art analytical equipment and calibrated instruments. All analytical tests are conducted using standardized or in-house procedures. We provide gas chromatography with mass spectrometry (GC/MS) equipment for the quantification and identification of organic compounds and an online TOC analyzer for the determination of organic compounds in ultrapure water. Thermal Desorption Gas Chromatography coupled with Mass Spectrometry (TD-GC/MS) Gas chromatography-mass spectrometry coupled with a thermal desorption unit is a universal method for the identification and quantification of a wide range of volatile as well as semi-volatile organic compounds in complex chemical environments. Air samples are collected on thermodesorption tubes packed with one or more solid adsorbents. Within a semi-quantitative screening analysis total organic compound quantities will be reported as well as the most abundant peaks can be identified by means of mass spectra libraries.


Total Organic Carbon (TOC)

Our highly-sensitive on-line TOC analyzer provides continuous monitoring of organics in ultrapure water and is able to deliver high-quality results down to a TOC concentration of 0.1 ppb. It enables quick and accurate measurements on-site to ensure the relevant demands for water quality. The analyzer will be installed directly at the place of measurement and the concentrations can be recorded directly on the device.

Individual samples, e.g. aqueous extracts, can be filled in sample vials and analyzed in a special offline mode.


Chemical Trace-Analysis for Metals and Ions

For the determination of elemental contamination in the ppt range, ICP-MS is the method of choice. Ion chromatography is applied if the concentration of ionic species (anions, cations) in water is in focus.

Inductively Coupled Plasma Mass Spectrometry (ICP-MS)
Inductively coupled plasma mass spectrometry (ICP-MS) is an elemental analysis technique for quantitative trace element analysis. It can detect almost all elements of the periodic table.

Our ICP-MS system has an excellent sensitivity and can operate down to sub-ppt limits, lower than most other analytical methods.


Ion Chromatography (IC)

Ion chromatography is the ideal method for analyzing anions, cations and other polar substances in aqueous media. A specific instrument design allows the simultaneous analysis of anions and cations from the same sample. Using a specific pre-concentration technique enables ultra-trace analysis down to the lower ppt-range.


Online AMC Measurements

Online analyzers are generally used for analyzing gaseous media. They enable fast and continuous analysis with real-time response of airborne molecular contamination and provide results with high accuracy and precision. Using our online analyzers simplifies the test setup and sampling process and make enables an enormous time saving.


Filter Test Installations

Our laboratory is equipped with several filter test rigs. Using high precision dosing options for gases and solvents like NOX, SO2, H2S, DMS, HCl, NH3, ozone, siloxanes, toluene, xylene and IPA nearly any kind of contamination relevant to cleanrooms can be simulated. Our online measurement equipment measures gas concentrations, temperature, humidity, air flow rate as well as pressure drop.


Particle Measurement

Available laser-based particle counters are used for measuring the particle concentration in air and water. Our laser particle counters specifically designed
for particle measurements in air or water can count and size particles as low as
0.1 Micrometer in air and 50 nm in water respectively.